Temperature balanced hydrogen sensor system with coupled palladium nanowires

Authors H.D. Tong , C.J.M. van Rijn , Erik Puik , Franc van der Bent
Published in Sensors and Actuators A: Physical
Publication date 25 February 2015
Research groups Microsystems Technology
Type Article


Author supplied from the article: Abstract A temperature compensated hydrogen sensor was designed and made capable of detecting H2 within a broad range of 100–10.000 ppm while compensating instantaneously for large (±25 °C) temperature variations. Two related operational constraints have been simultaneously addressed: (1) Selective, and sensitive detection under large temperature changes, (2) Fast warning at low and increasing H2 levels. Accurate measurements of hydrogen concentrations were enabled by matching relevant time-constants. This was achieved with a microchip having two temperature coupled palladium nanowires. One of the H2 sensitive Pd nanowires was directly exposed to hydrogen, whilst the other nanowire was used as a temperature sensor and as a reference. A drop forging technique was used to passivate the second Pd wire against H2 sensing. Temperature effects could be substantially reduced with a digital signal processing algorithm. Measurements were done in a test chamber, enabling the hydrogen concentration to be controlled over short and long periods. An early response for H2 sensing is attainable in the order of 600 milliseconds and an accurate value for the absolute hydrogen concentration can be obtained within 15 s.


  • Erik Puik
    Erik Puik
    • Professor
    • Research groups: Microsystems Technology

Language English
Published in Sensors and Actuators A: Physical
Year and volume 226 1 May
Key words Hydrogen sensing, Temperature compensation, Digital signal processing, Nanowire, Palladium, DEA
Page range 98-106

Microsystems Technology